Argon gas pressure and substrate temperature dependences of ZnO:Al film by magnetron sputtering

Journal of the Korean Physical Society

Volumn 45, Issue 1, 2004, Pages 206-210

  Kwak, Dong Joo ^a   Park, Kang Il ^a   Kim, Byung Sub ^a   Lee, Su Ho ^a   Lee, Se Jong ^a   Lim, Dong Gun ^b  

^a Kyungsung University   (South Korea)

^b Chungju National University   (South Korea)

Author keywords

Optical transmittance; Resistivity; ZnO:Al film

Indexed keywords

EID: 3843123023     PISSN: 03744884     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Conference Paper

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