The influence of thickness on piezoresistive temperature properties of polysilicon nanofilms

Chinese Journal of Sensors and Actuators

Volumn 20, Issue 11, 2007, Pages 2421-2425

  Liu, Xiao Wei ^a   Pan, Hui Yan ^a   Chuai, Rong Yan ^a,b   Wang, Xi Lian ^a   Li, Jin Feng ^c  

^a HARBIN INSTITUTE OF TECHNOLOGY   (China)

^b SHENYANG UNIVERSITY OF TECHNOLOGY   (China)

^c NONE

Author keywords

Gauge factor; Piezoresistive temperature properties; Polysilicon nanofilm; Temperature coefficient of gauge factor (TCGF); Temperature coefficient of resistance (TCR)

Indexed keywords

EID: 38349130282     PISSN: 10041699     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (12)

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