Ion beam shaping and downsizing of nanostructures

Nanotechnology

Volumn 19, Issue 5, 2008, Pages

  Zgirski, M ^a   Riikonen, K P ^a   Tuboltsev, V ^a,b   Jalkanen, P ^a   Hongisto, T T ^a   Arutyunov, K Yu ^a  

^a UNIVERSITY OF JYVÄSKYLÄ   (Finland)

^b UNIVERSITY OF HELSINKI   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ION BEAMS; SURFACE ANALYSIS; VACUUM APPLICATIONS;

ION BEAM TREATMENT; SURFACE EROSION;

NANOSTRUCTURES;

ALUMINUM; ION; NANOMATERIAL; NANOWIRE; SILICON; SILICON DIOXIDE;

ARTICLE; ELECTRON BEAM; PRIORITY JOURNAL; SCANNING ELECTROCHEMICAL MICROSCOPY;

EID: 38349004634     PISSN: 09574484     EISSN: 13616528     Source Type: Journal    
DOI: 10.1088/0957-4484/19/05/055301     Document Type: Article

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