Intelligent design of diagnosable systems: A case study of semiconductor manufacturing machines

Lecture Notes in Computer Science (including subseries Lecture Notes in Artificial Intelligence and Lecture Notes in Bioinformatics)

Volumn 4693 LNAI, Issue PART 2, 2007, Pages 877-884

  Wen, YuanLin ^a   Chung, ShengLuen ^b   Jeng, LiDer ^c   Jeng, MuDer ^a  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

^b NATIONAL TAIWAN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

^c CHUNG YUAN CHRISTIAN UNIVERSITY   (Taiwan)

Author keywords

Fault diagnosis; Petri nets; Semiconductor manufacturing

Indexed keywords

DISCRETE EVENT SIMULATION; FAILURE ANALYSIS; INTELLIGENT SYSTEMS; METALLORGANIC VAPOR PHASE EPITAXY; PETRI NETS; SEMICONDUCTOR DEVICE MANUFACTURE;

DIAGNOSABILITY ANALYSIS;

SYSTEMS ANALYSIS;

EID: 38049039830     PISSN: 03029743     EISSN: 16113349     Source Type: Book Series    
DOI: 10.1007/978-3-540-74827-4_110     Document Type: Conference Paper

References (8)

1. Jiang, S., Huang, Z., Chandra, V., Kumar, R.: A Polynomial Algorithm for Testing Diagnosability of Discrete-Event Systems. IEEE Trans. on Automatic Control 46(8), 1318-1321 (2001)
2. Lin, W.: Introduction to Metal-Organic Vapor Phase Epitaxy System and Technology. Instruments Today 24(2), 13-24 (2002)
3. Sampath, M., Lafortune, S., Sinnamohideen, K., Teneketzis, D.: Diagnosability of Discrete Event Systems. IEEE Trans. on Automatic Control 40(9), 1555-1557 (1995)
4. Wen, Y.L., Jeng, M.D., Huang, Y.S.: Diagnosability of Semiconductor Manufacturing Equipment. Material Science Forum 505, 1135-1140 (2006)
5. Wen, Y.L., Jeng, M.D., Jeng, L.D., Fan, P.S.: An Intelligent Technique Based on Petri Nets for Diagnosability Enhancement of Discrete Event Systems. In: Gabrys, B., Howlett, R.J., Jain, L.C. (eds.) KES 2006. LNCS (LNAI), vol. 4252, pp. 879-887. Springer, Heidelberg (2006)
6. Ushio, T., Onishi, I., Okuda, K.: Fault Detection Based on Petri Net Models with Faulty Behaviors. In: Proc. of the 1998 IEEE Int. Con. on Systems, Man, and Cybernetics, pp. 113-118. IEEE Computer Society Press, Los Alamitos (1998)
7. Martinez, J., Silva, M.: A simple and fast algorithm to obtain all invariants of a generalized Petri nets. In: Proc. of Second European Workshop on Application and Theory of Petri Nets. Informatik-Fachberichte, vol. 52, pp. 301-310 (1982)
8. Chung, S.-L.: Diagnosing PN-based models with partial observable transitions. Int. J. Computer Integrated Manufacturing 18(2-3), 158-169 (2005)