Spectroscopic ellipsometry as a tool for on-line monitoring and control of surface treatment processes

Materials Science Forum

Volumn 518, Issue , 2006, Pages 423-430

  Eitzinger, C ^e   Fikar, J ^f   Forsich, C ^d   Humlicek J ^f   Kruger A ^a   Kullmer, R ^b   Laimer, J ^d   Lingenhole E ^c   Lingenhole K ^c   Muhlberger M ^e   Muller T ^b   Stori H ^d   Wielsch, U ^a  

^a SENTECH INSTRUMENTS GMBH   (Germany)

^b RUBIG GmbH & co KG Engineering   (Austria)

^c Lingenhole Technology GmbH   (Austria)

^d VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^e PROFACTOR GMBH   (Austria)

^f MASARYK UNIVERSITY   (Czech Republic)

Author keywords

Closed loop control; Nitriding; On line monitor; Spectroscopic ellipsometry; Surface treatment

Indexed keywords

CLOSED LOOP CONTROL SYSTEMS; INVERSE PROBLEMS; PROCESS CONTROL; PROCESS MONITORING; PROTECTIVE COATINGS; SPECTROSCOPIC ELLIPSOMETRY;

MATERIAL TECHNOLOGY; MONITORING TOOL; ON-LINE MONITORING; OPTICAL METHOD;

SURFACE TREATMENT;

EID: 37849017860     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/msf.518.423     Document Type: Conference Paper

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