Low-cost electronics and thin film technology for sol-gel titania lambda probes

Sensors and Actuators, B: Chemical

Volumn 128, Issue 2, 2008, Pages 359-365

  Francioso, L ^a   Prato, M ^a   Siciliano, P ^a  

^a CNR IMM   (Italy)

Author keywords

Automotive gas sensors; Metal oxide patterning; PID loop temperature control; Silicon technology

Indexed keywords

AIR QUALITY; GYROSCOPES; MICROELECTRONICS; SILICON WAFERS; SOL-GELS; TEMPERATURE CONTROL; THIN FILMS; TITANIUM DIOXIDE;

BATCH PRODUCTION; COMBUSTION MONITORING; SILICON TECHNOLOGY;

PROBES;

EID: 37549037482     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.06.022     Document Type: Article

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