Metal-oxide semiconductor, field effect transistor-based microscale electro-optical multimode interference modulator on a silicon chip

Journal of Nanophotonics

Volumn 1, Issue 1, 2007, Pages

  Limon, Ofer ^a   Zalevsky, Zeev ^a   Businaro, Luca ^b  

^a BAR ILAN UNIVERSITY   (Israel)

^b CNR   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROOPTICAL DEVICES; FIELD EFFECT TRANSISTORS; LIGHT INTERFERENCE; MOS DEVICES; DIELECTRIC DEVICES; INTEGRATED OPTICS; INTERFEROMETERS; METALLIC COMPOUNDS; METALS; MODULATORS; OPTICAL SIGNAL PROCESSING; OXIDE SEMICONDUCTORS; SEMICONDUCTING SILICON; SILICON;

ELECTROOPTICAL MODULATORS; FREE CARRIERS; METAL OXIDE SEMICONDUCTORS; PLASMA DISPERSION EFFECT; APPLIED VOLTAGES; DEPLETION REGION; ELECTRO-OPTICAL; METAL OXIDE SEMICONDUCTOR; MODE CONVERSIONS; MULTI-MODE INTERFERENCE; PLASMA DISPERSION EFFECTS;

LIGHT MODULATORS;

EID: 37249092442     PISSN: None     EISSN: 19342608     Source Type: Journal    
DOI: 10.1117/1.2821814     Document Type: Article

References (20)

1. C. Luo, J. D. Joannopoulos, and S. Fan, "Nonlinear photonic crystal micro devices for optical integration," Opt. Lett. 28, 637-639 (2003) 10.1364/OL.28.000637
2. E. Yablonovich, "Photonic crystals: semiconductors of light," Sci. Am. 285(6), 47-55 (2001).
3. T. F. Krauss, "Planar photonic crystal waveguide devices for integrated optics," Phys. Status Solidi A 197, 688-702 (2003) 10.1002/pssa.200303117
4. M. Loncar, T. Doll, J. Vuckovic, and A. Scherer, "Design and fabrication of silicon photonic crystal optical waveguides," J. Lightwave Technol. 18, 1402-1411 (2000) 10.1109/50.887192
5. H. W. Tan, H. M. Van Driel, S. L. Schweizer, R. B. Wehrspohn, and U. Gosele, "Tuning a 2-D silicon photonic crystal using nonlinear optics," in IEEE Conf. on Laser and Electro-Optics, pp. 880-881 (2004) 10.1109/IQEC.2004.241658
6. A. Liu, R. Jones, L. Liao, D. Samara-Rubio, D. Rubin, O. Cohen, R. Nicolaescu, and M. Paniccia, "A high-speed silicon optical modulator based on a metal-oxide-semiconductor capacitor," Nature 427, 615-618 (2004) 10.1038/nature02310
7. L. Liao, D. Samara-Rubio, M. Morse, A. Liu, D. Hodge, D. Rubin, U. D. Keill, and T. Franck, "High speed silicon Mach-Zehnder modulator," Opt. Exp. 13, 3129-3135 (2005) 10.1364/OPEX.13.003129
8. D. Samar-Rubio, U. D. Keil, L. Liao, T. Franck, A. Liu, D. W. Hodge, D. Rubin, and R. Cohen, "Customized drive electronics to extended silicon optical modulators to 4Gb/s," J. Lightwave Technol. 23, 4305-4314 (2005) 10.1109/JLT.2005.859405
9. F. Gardes, G. Reed, N. Emerson, and C. Png, "A sub-micron depletion-type photonic modulator in silicon-on-insulator," Opt. Exp. 13, 8845-8854 (2005) 10.1364/OPEX.13.008845
10. C. E. Png, G. T. Reed, R. M. Atta, G. J. Ensell, and A. G. R. Evans, "Development of small silicon modulators in silicon-on-insulator (SOI)," Proc. SPIE 4997, 190-197 (2003) 10.1117/12.476666
11. F. Gan and F. X. Kartner, "High-speed silicon electrooptic modulator design," IEEE Photon Technol. Lett. 17, 1007-1009 (2005) 10.1109/LPT.2005.846756
12. V. R. Almeida, C. A. Barrios, R. R. Panepucci, and M. Lipson, "All optical control of light on silicon chip," Nature 431, 1081-1084 (2004) 10.1038/nature02921
13. Q. Xu, B. Schmidt, S. Pradhan, and M. Lipson, "Micrometre-scale silicon electro-optic modulator," Nature 435, 325-327 (2005) 10.1038/nature03569
14. H. K. Tsang, C. S. Wong, T. K. Liang, I. E. Day, S. W. Roberts, A. Harpin, J. Drake, and M. Asghari, "Optical dispersion, two-photon absorption and self-phase modulation in silicon waveguides at 1.5 μm wavelength," Appl. Phys. Lett. 80, 416-418 (2002) 10.1063/1.1435801
15. M. Fetterman, C. P. Chao, and S. R. Forrest, "Fabrication and analysis of high-contrast InGaAsP-InP Mach-Zehnder modulation for ise at 1.55 μm wavelength," IEEE Photon. Technol. Lett. 8, 69-71 (1996) 10.1109/68.475781
16. O. Leclerc, C. Duchet, P. Brindel, M. Goix, E. Grard, E. Maunand, and E. Desurvire, "Polarisation-independent InP push-pull Mach-Zehnder modulation for 20 Gbit/s soliton regeneration," Electron. Lett. 34, 1011-1013 (1998) 10.1049/el:19980745
17. V. Van, T. A. Ibrahim, K. Ritter, P. P. Absil, F. G. Johnson, R. Grover, J. Goldhar, and P.-T. Ho, "All-optical nonlinear switching in GaAs-AlGaAs micro ring resonators," IEEE Photon. Technol. Lett. 14, 74-76 (2002) 10.1109/68.974166
18. R. A. Soref and B. R. Bennett, "Electro-optical effects in Silicon," IEEE J. Quantum Electron. 23, 123-129 (1987) 10.1109/JQE.1987. 1073206
19. S. M. Sze, Physics of Semiconductor Devices, 2nd ed., Wiley, New York (1981).
20. C. G. B. Garrett and W. H. Brattain, "Physical theory of semiconductor surfaces," Phys. Rev. 99, 376-387 (1955) 10.1103/PhysRev.99. 376