Integrated folding 4 × 4 optical matrix switch with total internal reflection mirrors on SOI by anisotropic chemical etching

IEEE Photonics Technology Letters

Volumn 17, Issue 6, 2005, Pages 1187-1189

  Liu, Jingwei ^a   Yu, Jinzhong ^a   Chen, Shaowu ^a   Li, Zhiyong ^a  

^a INSTITUTE OF SEMICONDUCTORS   (China)

Author keywords

Optical switch; Silicon on insulator (SOI); Total internal reflection (TIR) mirror; Wet chemical etching

Indexed keywords

ANISOTROPY; ETCHING; LIGHT REFLECTION; MIRRORS; POTASSIUM COMPOUNDS; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON ON INSULATOR TECHNOLOGY; SILICON WAFERS;

OPTICAL MATRIX SWITCH; TOTAL INTERNAL REFLECTION (TIR) MIRROR; WET CHEMICAL ETCHING;

OPTICAL SWITCHES;

EID: 20544434080     PISSN: 10411135     EISSN: None     Source Type: Journal    
DOI: 10.1109/LPT.2005.846609     Document Type: Article

References (10)

1. K. Komatsu, K. Hamamoto, M. Sugimoto, A. Ajisawa, Y. Kohga, and A. Suzuki, "4 × 4 GaAs/AlGaAs optical matrix switches with uniform device characteristics using alternating Δβ electrooptic guided-wave directional couplers," J. Lightw. Technol., vol. 9, no. 7, pp. 871-878, Jul. 1991.
2. R. Moosburger and K. Petermann, "4 × 4 digital optical matrix switch using polymeric oversized rib waveguides," IEEE Photon. Technol. Lett., vol. 10, no. 5, pp. 684-686, May 1998.
3. T. Goh, "Recent advances in large-scale silica based thermo-optic switches," in Proc. SPIE, vol. 4582, 2001, pp. 49-56.
4. A. House, R. Whiteman, L. Kling, S. Day, A. Knights, D. Hogan, F. Hopper, and M. Asghari, "Silicon waveguide integrated optical switching with microsecond swthching speed," OFC, vol. 2, pp. 449-450, 2003.
5. Y. Chen, Y. Li, J. Xia, J. Liu, S. Chen, and J. Yu, "Silicon-on-insulator-based waveguide switch with fast response," Chin. Phys. Lett., vol. 22, pp. 139-141, 2005.
6. J. Yu, S. Chen, J. Xia, Z. Wang, Z. Fan, Y. Li, J. Liu, D. Yang, and Y. Chen, "Research progresses of SOI optical waveguide device and integrated optical switch matrix," Sci. China Ser. E, vol. 34, pp. 1081-1093, 2004.
7. D. Dai and S. He, "Analysis of characteristics of bent rib waveguides," J. Opt. Soc. Amer. A, vol. 21, pp. 113-121, 2004.
8. Y. Z. Tang, W. H. Wang, T. Li, and Y. L. Wang, "Integrated waveguide turning mirror in silicon-on-insulator," IEEE Photon. Technol. Lett., vol. 14, no. 1, pp. 68-70, Jan. 2002.
9. H. Han, D. V. Forbes, and J. J. Coleman, "Self-aligned high-quality total internal reflection mirrors," IEEE Photon. Technol. Lett., vol. 7, no. 8, pp. 899-901, Aug. 1995.
10. R. M. Lorenzo, C. Lorente, E. J. Abril, and M. López, "Improved self-imaging characteristics in 1 × N multimode couplers," in Proc. Inst. Elect. Eng., Optoelectronics, vol. 145, 1998, pp. 65-69.