SCOPUS 정보 검색 플랫폼

Kuei Suan Jen Hsueh Pao/ Journal of the Chinese Ceramic Society

Volumn 35, Issue 11, 2007, Pages 1514-1519

Preparation of ZrW2O8/Cu gradient films by radio frequency magnetron sputtering

(3) Cheng, Xiaonong a Song, Juan a Yan, Xuehua a

Author keywords

Copper; Gradient films; Magnetron sputtering; Zirconium tungstate

Indexed keywords

COPPER; CRYSTALLIZATION; HEAT TREATMENT; INTEGRATED CIRCUITS; MAGNETRON SPUTTERING; MORPHOLOGY; SILICON WAFERS; TUNGSTEN COMPOUNDS; ZIRCONIUM COMPOUNDS;

ELEMENTS; GRADIENT DISTRIBUTIONS; GRADIENT FILMS; PREPARATION; ZIRCONIUM TUNGSTATE;

FUNCTIONALLY GRADED MATERIALS;

EID: 37149034795 PISSN: 04545648 EISSN: None Source Type: Journal
DOI: None Document Type: Article

Times cited : (5)

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* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.