Micromachined negative thermal expansion thin films

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 2, Issue , 2003, Pages 1148-1151

  Sutton, M S ^a   Talghader, J ^a  

^a UNIVERSITY OF MINNESOTA DULUTH   (United States)

Author keywords

Actuators; Biomembranes; Micromirrors; Mirrors; Optical films; Substrates; Temperature; Thermal engineering; Thermal expansion; Transistors

Indexed keywords

ACTUATORS; BUOYANCY; EXPANSION; MICROSYSTEMS; MIRRORS; OPTICAL FILMS; SOLID-STATE SENSORS; STOICHIOMETRY; SUBSTRATES; TEMPERATURE; THIN FILMS; TRANSDUCERS; TRANSISTORS;

ANNEALING CONDITION; BIOMEMBRANES; COEFFICIENTS OF THERMAL EXPANSIONS; FILM STOICHIOMETRY; MICRO MIRROR; NEGATIVE THERMAL EXPANSION; THERMAL ENGINEERING; ZIRCONIUM TUNGSTATE;

THERMAL EXPANSION;

EID: 84944742348     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1216974     Document Type: Conference Paper

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