Imaging with surface sensitive backscattered electrons

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2017-2019

  Luo, T ^a   Khursheed, A ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; COMPUTER SIMULATION; ELECTRON SCATTERING; IMAGING SYSTEMS; SCANNING ELECTRON MICROSCOPY;

BACKSCATTERED ELECTRONS (BSE); BEAM ENERGY; LOW EMISSION ANGLES;

ELECTRONS;

EID: 37149021972     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2781523     Document Type: Article

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