Comparison of experimental and Monte Carlo simulated BSE spectra of multilayered structures and 'in-depth' measurements in a SEM

Journal of Physics D: Applied Physics

Volumn 35, Issue 12, 2002, Pages 1433-1437

  Rau, E ^a   Hoffmeister, H ^b   Sennov, R ^a   Kohl, H ^b  

^a MOSCOW STATE UNIVERSITY   (Russian Federation)

^b UNIVERSITY OF MÜNSTER   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

BACKSCATTERING; COMPUTER SIMULATION; ELECTRIC POTENTIAL; ELECTRON REFLECTION; ELECTROSTATICS; MONTE CARLO METHODS; MULTILAYERS; SCANNING ELECTRON MICROSCOPY; SPECTRUM ANALYSIS; THIN FILMS;

BACKSCATTERED ELECTRONS (BSE); ELECTROSTATIC TOROIDAL SPECTROMETERS;

ELECTRON SCATTERING;

EID: 0037150833     PISSN: 00223727     EISSN: None     Source Type: Journal    
DOI: 10.1088/0022-3727/35/12/322     Document Type: Article

References (17)