Experimental demonstration of dark field illumination using contact hole features

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2453-2460

  Crouse, Michael M ^a   Schmitt Weaver, Emil ^a   Hansen, Steven G ^a   Routh, Robert ^a  

^a ASML US Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTACT HOLE FEATURES; IMAGE MODULATION; IMAGE TONE REVERSAL; PROJECTION OPTICS; RESOLUTION ENHANCEMENT TECHNIQUE (RET);

DIFFRACTION; IMAGE ANALYSIS; STRAY LIGHT; WAVELENGTH;

LITHOGRAPHY;

EID: 37149021049     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2800323     Document Type: Article

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