Lithographic projectors with dark-field illumination

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 3301-3305

  White, D L ^a   Cirelli, R A ^a   Spector, S J ^a   Wood II, O R ^a  

^a LUCENT TECHNOLOGIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033267077     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.590999     Document Type: Article

References (3)

1. M. D. Levenson, N. S. Viswanathan, and R. A. Simpson, IEEE Trans. Electron Devices ED-29, 1828 (1982).
2. J. Garafalo, C. T. Biddick, R. C. Kostelak, and S. Vaidya, J. Vac. Sci. Technol. B 11, 2651 (1993).
3. H. Fukuda, Jpn. J. Appl. Phys., Part 1 30, 3037 (1991).