Production of noble gas ion beams in a focused ion beam machine using an electron beam ion trap

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 25, Issue 6, 2007, Pages 2162-2167

  Ullmann, Falk ^a   Grossmann, Frank ^a   Ovsyannikov, Vladimir P ^a   Gierak, Jacques ^b   Bourhis, Eric ^b   Ferré, Jacques ^c   Jamet, Jean Pierre ^c   Mougin, Alexandra ^c   Zschornack, Günter ^d  

^a DREEBIT GmbH   (Germany)

^b UNIV PARIS SUD   (France)

^c UNIVERSITÉ PARIS SUD   (France)

^d DRESDEN UNIVERSITY OF TECHNOLOGY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGED PARTICLES; ELECTRON BEAMS; ELECTRON TRAPS; ION BEAMS;

ELECTRON BEAM ION TRAP; ION BEAM MACHINE; PRELIMINARY INVESTIGATIONS;

INERT GASES;

EID: 37149008948     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2799971     Document Type: Article

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