Chemically amplified photolithography for the fabrication of high density oligonucleotide arrays

Polymeric Materials Science and Engineering, Proceedings of the ACS Division of Polymeric Materials Science and Engineering

Volumn 76, Issue , 1997, Pages 597-598

  Beecher, Jody E ^a   McGall, Glenn H ^a   Goldberg, Martin J ^a  

^a Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ARRAYS; DNA; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; OLIGOMERS; ORGANIC ACIDS; ORGANIC COATINGS; PHOTORESISTS; THICK FILMS;

CHEMICALLY AMPLIFIED PHOTOLITHOGRAPHY; DICHLOROMETHANE; DIMETHOXYTRITYL GROUPS; HIGH DENSITY OLIGONUCLEOTIDE ARRAYS; PHOTOACID GENERATOR; TRICHLOROACETIC ACID;

PHOTOLITHOGRAPHY;

EID: 0030714194     PISSN: 07430515     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)