Hydrothermal method grown large-sized zinc oxide single crystal as fast scintillator for future extreme ultraviolet lithography

Applied Physics Letters

Volumn 91, Issue 23, 2007, Pages

  Tanaka, Momoko ^a,d   Nishikino, Masaharu ^a   Yamatani, Hiroshi ^a   Nagashima, Keisuke ^a   Kimura, Toyoaki ^a   Furukawa, Yusuke ^b   Murakami, Hidetoshi ^b   Saito, Shigeki ^b   Sarukura, Nobuhiko ^b   Nishimura, Hiroaki ^b   Mima, Kunioki ^b   Kagamitani, Yuji ^c   Ehrentraut, Dirk ^c   Fukuda, Tsuguo ^c  

^a JAPAN ATOMIC ENERGY AGENCY   (Japan)

^b OSAKA UNIVERSITY   (Japan)

^c TOHOKU UNIVERSITY   (Japan)

^d GRADUATE UNIVERSITY FOR ADVANCED STUDIES   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CRYSTAL STRUCTURE; LASER EXCITATION; LITHOGRAPHY; PHOSPHORS;

EXCITON EMISSION; ULTRAVIOLET LITHOGRAPHY;

SINGLE CRYSTALS;

EID: 36849030686     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2815920     Document Type: Article

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