Fabrication of PTFE thin films by dual catalytic chemical vapor deposition method

Thin Solid Films

Volumn 516, Issue 5, 2008, Pages 687-690

  Yasuoka, Hiroaki ^a   Yoshida, Masahiro ^a   Sugita, Ken ^a   Ohdaira, Keisuke ^a   Murata, Hideyuki ^a   Matsumura, Hideki ^a  

^a JAPAN ADVANCED INSTITUTE OF SCIENCE AND TECHNOLOGY   (Japan)

Author keywords

Catalysis; Catalyst; Catalyzer; Chemical vapor deposition (CVD); Hexafluoropropylene oxide (HFPO); Polytetrafluoroethylene (PTFE)

Indexed keywords

CATALYSIS; CATALYSTS; CHEMICAL VAPOR DEPOSITION; DEPOSITION RATES; POLYTETRAFLUOROETHYLENES; TUNGSTEN;

CATALYZERS; CATALYZING MATERIALS; HEXAFLUOROPROPYLENE OXIDE (HFPO);

THIN FILMS;

EID: 36749103150     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2007.06.185     Document Type: Article

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