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Volumn 46, Issue 11, 2007, Pages

Optimal condition for full-field heterodyne interferometry

Author keywords

Digital camera; Full field heterodyne interferometry; IEEE 1241 sine wave fitting algorithm

Indexed keywords

ALGORITHMS; ERROR DETECTION; HETERODYNING; INTERFEROMETRY;

EID: 36749036574     PISSN: 00913286     EISSN: 15602303     Source Type: Journal    
DOI: 10.1117/1.2802095     Document Type: Article
Times cited : (12)

References (10)
  • 1
    • 0019531992 scopus 로고
    • Optical heterodyne profilometry
    • G. E. Sommargren, " Optical heterodyne profilometry., " Appl. Opt. 20, 610-618 (1981).
    • (1981) Appl. Opt. , vol.20 , pp. 610-618
    • Sommargren, G.E.1
  • 2
    • 84975534519 scopus 로고
    • Heterodyne profiling instrument for the angstrom region
    • D. Pantzer, J. Politch, and L. Ek, " Heterodyne profiling instrument for the angstrom region., " Appl. Opt. 25, 4168-4172 (1986).
    • (1986) Appl. Opt. , vol.25 , pp. 4168-4172
    • Pantzer, D.1    Politch, J.2    Ek, L.3
  • 3
    • 4143096411 scopus 로고    scopus 로고
    • A heterodyne interferometer using an electro-optic modulator for measuring small displacement
    • D. C. Su, M. H. Chiu, and C. D. Chen, " A heterodyne interferometer using an electro-optic modulator for measuring small displacement., " J. Opt. 27, 19-23 (1996).
    • (1996) J. Opt. , vol.27 , pp. 19-23
    • Su, D.C.1    Chiu, M.H.2    Chen, C.D.3
  • 4
    • 0141998026 scopus 로고    scopus 로고
    • Improved technique for measuring refractive index and thickness for a transparent plate
    • Z. C. Jian, C. C. Hsu, and D. C. Su, " Improved technique for measuring refractive index and thickness for a transparent plate., " Opt. Commun. 226, 135-140 (2003).
    • (2003) Opt. Commun. , vol.226 , pp. 135-140
    • Jian, Z.C.1    Hsu, C.C.2    Su, D.C.3
  • 5
    • 0141741292 scopus 로고    scopus 로고
    • Full-field heterodyne interferometer for shape measurement: Experimental characteristics of the system
    • T. Tkaczyk and R. Jozwicki, " Full-field heterodyne interferometer for shape measurement: experimental characteristics of the system., " Opt. Eng. 42, 2391-2399 (2003).
    • (2003) Opt. Eng. , vol.42 , pp. 2391-2399
    • Tkaczyk, T.1    Jozwicki, R.2
  • 6
    • 2942616887 scopus 로고    scopus 로고
    • Full-field heterodyne. interference microscope with spatially incoherent illumination
    • M. C. Pitter, C. W. See, and M. G. Somekh, " Full-field heterodyne. interference microscope with spatially incoherent illumination., " Opt. Lett. 29, 1200-1202 (2004).
    • (2004) Opt. Lett. , vol.29 , pp. 1200-1202
    • Pitter, M.C.1    See, C.W.2    Somekh, M.G.3
  • 7
    • 33744829475 scopus 로고    scopus 로고
    • Random depth access full-field heterodyne low-coherence interferometry utilizing acousto-optic modulation and a complementary metal-oxide semiconductor camera
    • P. Egan, M. J. Connely, F. Lakestani, and M. P. Whelan, " Random depth access full-field heterodyne low-coherence interferometry utilizing acousto-optic modulation and a complementary metal-oxide semiconductor camera., " Opt. Lett. 31, 912-914 (2006).
    • (2006) Opt. Lett. , vol.31 , pp. 912-914
    • Egan, P.1    Connely, M.J.2    Lakestani, F.3    Whelan, M.P.4
  • 8
    • 84975542832 scopus 로고
    • Phase detection of equidistant fringes for highly sensitive optical sensing, I. Princuple and error analyses
    • S. Nakadate, " Phase detection of equidistant fringes for highly sensitive optical sensing, I. Princuple and error analyses., " J. Opt. Soc. Am. A 5, 1258-1264 (1988).
    • (1988) J. Opt. Soc. Am. A , vol.5 , pp. 1258-1264
    • Nakadate, S.1
  • 10
    • 79957590676 scopus 로고
    • Certain topics in telegraph transmission theory
    • H. Nyquist, " Certain topics in telegraph transmission theory., " Trans. AIEE 47, 617-644 (1928).
    • (1928) Trans. AIEE , vol.47 , pp. 617-644
    • Nyquist, H.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.