Growth rate reproducibility for magnesium fluoride films by sputtering

Shinku/Journal of the Vacuum Society of Japan

Volumn 46, Issue 8, 2003, Pages 624-627

  Kawamata, Ken ^a   Deguchi, Takeshi ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ABSORPTION; GROWTH RATE; HIGH TEMPERATURE EFFECTS; MOLECULAR DYNAMICS; PRESSURE EFFECTS; SPUTTERING;

MAGNESIUM FLUORIDE; MOLECULAR DISSOCIATION;

MAGNESIUM COMPOUNDS;

EID: 36448948219     PISSN: 05598516     EISSN: None     Source Type: Journal    
DOI: 10.3131/jvsj.46.624     Document Type: Article

References (3)

1. K. Kawamata, T. Shouzu and N. Mitamura: Vacuum, 51, NO. 4 (1998) 559.
2. Japanese source
3. K. Kawamata and T. Shouzu: Proc. 7th Topical Meeting on Optical Interference Coatings, Tucson, USA, 1998 (Optical Society of America) 44.