K-M-S (keep-molecules sputtering) deposition of optical MgF2 thin films

Vacuum

Volumn 51, Issue 4, 1998, Pages 559-564

  Kawamata, K ^a   Shouzu, T ^a   Mitamura, N ^a  

^a OLYMPUS CORPORATION   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

HIGH TEMPERATURE EFFECTS; LIGHT EXTINCTION; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; MOLECULES; REFRACTIVE INDEX; SPUTTER DEPOSITION; SUBSTRATES; THIN FILMS;

EXTINCTION COEFFICIENT; MAGNESIUM FLUORIDE;

OPTICAL FILMS;

EID: 0032316157     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0042-207x(98)00253-x     Document Type: Article

References (7)

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