Transient species induced in X-ray chemically amplified positive resists : post-exposure delay effect

Journal of Photopolymer Science and Technology

Volumn 9, Issue 4, 1996, Pages 619-626

  Nagahara, Seiji ^a   Yamashita, Yoshio ^b   Taguchi, Takao ^a,b   Kozawa, Takahiro ^b,c   Tagawa, Seiichi ^c  

^a OSAKA UNIVERSITY   (Japan)

^b SORTEC Corporation   (Japan)

^c UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3643122319     PISSN: 09149244     EISSN: None     Source Type: Journal    
DOI: 10.2494/photopolymer.9.619     Document Type: Article

References (13)

1. N. Atoda, J.Photopolymer Sei. Tech., 8 (1995) 729
2. H. Ito and C. G. Willson, Technical Papers of SPE Regional Technical Conference on Photopolymers (1982)331
3. Y. Yamashita, M. Morigami, T. Watanabe, S. Fujiwara, and J. Nishino, J.Photopolymer Sei. Tech., 7 (1994) 551
4. H. Ban, J.Nakamura, K. Deguchi and A. Tanaka, J. Vac. Sei. Technol., 12 (1994) 3905
5. E. Reichmanis, F. M. Houlihan, O. Nalamasu and T. X. Neenan, ACS Symposium Series 537, L. F. Tompson, C. G. Willson, Seiichi Tagawa, Eds., ACS Washington, D.C. (1994) pp.2-24
6. Y. Yamashita, T. Taguchi and T. Watanabe, SPIE Proc., 2438 (1995) 617
7. O. Nalamasu, A. G. Timko, E. Reichmanis, F. M. Houlihan, A. E. Novembre, R. Tarascon, N. Münzel, and S. G. Slater, ACS Symposium Series 614, E. Reichmanis, C. K. Ober, S. A. MacDonald, T. Iwayanagi, T. Nishikubo, Eds., ACS Washington, D.C., (1995) pp.4-20
8. H. Ito, G. Breyta, D. C. Hofer, and R.Sooriyakumaran, ACS Symposium Series, 614 (1995) pp.2134
9. O. Nalamasu, E. Reichmanis, M. Cheng, V. Pol, J. M. Kometani, F. M. Houlihan, T. X. Neenan, M. P. Bohrer, D. A. Mixon, L. F. Thompson, Proc. Soc. Photo-Opt Inst. Eng., 1466 (1991) 13
10. S. A. MacDonald, N. J. Clecak, H. R. Wendt, C. G. Willson, C. D. Synder, C. J. Knors, N. Peyoe, J. G. Maltabes, J. Morrow, A. E. Mac Guire and S. J. Holmes, Proc. Soc. Photo-Opt Inst. Eng., 1466 (1991)2
11. T. Kozawa, M. Uesaka, T. Watanabe, Y. Yamashita, H. Shibata, Y. Yoshida, S. Tagawa, ACS Symposium Series 579, H. Ito, S. Tagawa, K. Horie, Eds., ACS Washington, D.C. (1994) pp.121-129
12. T. Watanabe, Y. Yamashita, T. Kozawa, Y. Yoshida, S. Tagawa, J. Vac. Sei. Technol., B12
13. M. Kodaira, N. Awaji, T. Kishimoto, H. Usanü and M. Watanabe, Jpn. J. Appl. Phys., 30 (.991) 3043