Electron Rutherford back-scattering case study: Oxidation and ion implantation of aluminium foil

Surface and Interface Analysis

Volumn 39, Issue 11, 2007, Pages 871-876

  Went, M R ^a   Vos, M ^a  

^a AUSTRALIAN NATIONAL UNIVERSITY   (Australia)

Author keywords

Aluminium; Aluminium oxide; Electron Rutherford back scattering; Rutherford back scattering

Indexed keywords

ALUMINUM; ELECTRON BEAMS; ION IMPLANTATION; OXIDE FILMS; RUTHERFORD BACKSCATTERING SPECTROSCOPY;

ALUMINIUM FOIL; ALUMINIUM OXIDE; ELECTRON RUTHERFORD BACK SCATTERING (ERBS); SPUTTER CLEANING PROCESS;

METAL FOIL;

EID: 36249026470     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2603     Document Type: Article

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