Ultrasensitive nanomechanical photonic microsensor

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6593, Issue , 2007, Pages

  Barrios, Carlos Angulo ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

Integrated optics; Micro opto electro mechanical systems (MOEMS); Sensors; Silicon photonics

Indexed keywords

INTEGRATED OPTICS; NEMS; OPTICAL SENSORS; OPTICAL WAVEGUIDES; PHOTONICS; SILICON NITRIDE;

DEFLECTION SENSITIVITY; HORIZONTAL SLOT WAVEGUIDES; SILICON PHOTONICS;

MICROSENSORS;

EID: 36248974132     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.723390     Document Type: Conference Paper

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