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Volumn 52, Issue 1, 2008, Pages 91-98

A derivation of the van der Pauw formula from electrostatics

Author keywords

Electrostatics boundary value problem; Resistivity measurement; van der Pauw technique

Indexed keywords

CONFORMAL MAPPING; ELECTRIC POTENTIAL; ELECTROSTATICS; SEMICONDUCTOR DEVICES; VAN DER WAALS FORCES;

EID: 36248953764     PISSN: 00381101     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sse.2007.07.029     Document Type: Article
Times cited : (35)

References (12)
  • 1
    • 0000400594 scopus 로고
    • A method of measuring the resistivity and Hall coefficient on lamellae of arbitrary shape
    • van der Pauw L.J. A method of measuring the resistivity and Hall coefficient on lamellae of arbitrary shape. Phil Tech Rev 20 (1958) 220-224
    • (1958) Phil Tech Rev , vol.20 , pp. 220-224
    • van der Pauw, L.J.1
  • 2
    • 0022701002 scopus 로고
    • Geometrical correction factors for resistivity of semiconductors by the square four-point probe method
    • Yamashita M. Geometrical correction factors for resistivity of semiconductors by the square four-point probe method. Jpn J Appl Phys 23 (1986) 563-567
    • (1986) Jpn J Appl Phys , vol.23 , pp. 563-567
    • Yamashita, M.1
  • 3
    • 17044413581 scopus 로고    scopus 로고
    • Effects of sample thickness on the van der Pauw technique for resistivity measurements
    • Kasl C., and Hoch M.J.R. Effects of sample thickness on the van der Pauw technique for resistivity measurements. Rev Sci Instrum 76 (2005) 033907-1-033907-4
    • (2005) Rev Sci Instrum , vol.76
    • Kasl, C.1    Hoch, M.J.R.2
  • 4
    • 0016309978 scopus 로고
    • Contact size effects on the van der Pauw method for resistivity and Hall coefficient measurements
    • Chwang R., Smith B.J., and Crowell C.R. Contact size effects on the van der Pauw method for resistivity and Hall coefficient measurements. Solid-State Electron 17 (1974) 1217-1227
    • (1974) Solid-State Electron , vol.17 , pp. 1217-1227
    • Chwang, R.1    Smith, B.J.2    Crowell, C.R.3
  • 9
    • 36248953515 scopus 로고    scopus 로고
    • Davinci Taurus Medici. User guide: version Y-2006.06. Mountain View (CA): Synopsys, Inc.; 2006.
  • 11
    • 0001185093 scopus 로고
    • Effect of contact size and placement, and of resistive inhomogeneities on van der Pauw measurements
    • Koon D.W. Effect of contact size and placement, and of resistive inhomogeneities on van der Pauw measurements. Rev Sci Instrum 60 (1989) 271-274
    • (1989) Rev Sci Instrum , vol.60 , pp. 271-274
    • Koon, D.W.1
  • 12
    • 0345646934 scopus 로고
    • Measurement of contact placement errors in the van der Pauw technique
    • Koon D.W., Bahl A.A., and Duncan E.O. Measurement of contact placement errors in the van der Pauw technique. Rev Sci Instrum 60 (1989) 275-276
    • (1989) Rev Sci Instrum , vol.60 , pp. 275-276
    • Koon, D.W.1    Bahl, A.A.2    Duncan, E.O.3


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.