Cu surface morphology evolution during electropolishing

Electrochemical and Solid-State Letters

Volumn 11, Issue 1, 2008, Pages

  Shivareddy, Shyamala ^a,b   Bae, Sang Eun ^a,b   Brankovic, Stanko R ^a,b  

^a UNIVERSITY OF HOUSTON   (United States)

^b ELECTROCHEMICAL SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTROPOLISHING THEORY; KINETIC CONTROL; SEMIEMPIRICAL FUNCTION;

COPPER; ELECTRODEPOSITION; LINEAR REGRESSION; MATHEMATICAL MODELS; SURFACE MORPHOLOGY;

ELECTROLYTIC POLISHING;

EID: 36148929870     PISSN: 10990062     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2803877     Document Type: Article

References (21)

1. W. J. Mc. G. Tegart, The Electrolytic and Chemical Polishing of Metals in Research and Industry, 7th ed., Pergamon Press, London (1959).
2. J. D. Reid, U.S. Pat. 6,653,226 (2003).
3. W. D. Chandler, U.S. Pat. 6,579,439 (2003).
4. R. W. Cheung, U.S. Pat. 6,056,864 (2000).
5. C. Wagner, J. Electrochem. Soc., 101, 225 (1954).
6. S.-C. Chang, J.-M. Sheih, B.-T. Dai, M.-S. Feng, Y.-H. Li, C. H. Shin, M. H. Tsai, S. L. Shue, R. S. Liang, and U.-L. Wang, Electrochem. Solid-State Lett., 6, G72 (2003).
7. J. Huo, R. Solanki, and J. McAndrew, Electrochem. Solid-State Lett. 1099-0062 10.1149/1.1848292, 8, C33 (2005); A. C. West, H. Deligianni, and P. C. Andricacos, IBM J. Res. Dev., 49, 37 (2005).
8. J. Huo, R. Solanki, and J. McAndrew, Electrochem. Solid-State Lett. 1099-0062 10.1149/1.1848292, 8, C33 (2005); A. C. West, H. Deligianni, and P. C. Andricacos, IBM J. Res. Dev., 49, 37 (2005).
9. P. Meakin, Fractals, Scaling and Growth Far from Equilibrium, pp. 4 and 65, Cambridge University Press, Cambridge, England (1998).
10. F. Family and T. Vicsek, J. Phys. A, 18, L75 (1985).
11. S. Huo and W. Schwarzacher, Phys. Rev. Lett., 86, 256 (2001).
12. P. Meakin and J. M. Deutch, J. Chem. Phys., 85, 2320 (1986).
13. B. Du and I. I. Suni, J. Electrochem. Soc., 151, C375 (2004).
14. L. M. Galathara, K. S. Kahanda, X. Sou, R. Farrell, and P. Wong, Phys. Rev. Lett., 68, 3741 (1992).
15. D. G. Foster, Y. Shapir, and J. Jorne, J. Electrochem. Soc., 152, C462 (2005).
16. D. G. Foster, Y. Shapir, and J. Jorne, J. Electrochem. Soc., 150, C375 (2003).
17. R. C. Salvarezza and A. J. Arvia, in Electrochemical Nanotechnology, W. J. Lorenz, and, W. Plieth, Editors, Wiley-VCH, New York (1998).
18. R. C. Salvarezza, L. Vazquez, P. Herrasti, P. Ocon, J. M. Vara, and A. J. Arvia, Europhys. Lett., 20, 727 (1992).
19. P. Meakin, Fractals, Scaling and Growth Far from Equilibrium, p. 85, Cambridge University Press, Cambridge, England (1998).
20. A.-L. Barabasi and H. E. Stanley, Fractal Concepts in Surface Growth, p. 19, Cambridge University Press, Cambridge, England (1995).
21. P. Neogi, J. Electroanal. Chem., 595, 1 (2006).