Development of nano-columnar carbon coating for dry micro-stamping

Surface and Coatings Technology

Volumn 202, Issue 4-7, 2007, Pages 1177-1181

  Aizawa, Tatsuhiko ^a   Iwamura, Eiji ^b   Itoh, Kuniyoshi ^c  

^a UNIVERSITY OF TORONTO   (Canada)

^b R and D Center   (Japan)

^c Seki Corporation   (Japan)

Author keywords

Amorphous carbon film; Dry precise stamping; Electron beam irradiation; Nano columnar structure; Reversible deformability; Sputtering

Indexed keywords

AMORPHOUS CARBON; CHEMICAL MODIFICATION; DEFORMATION; FORMABILITY; GRAPHITIZATION; LUBRICATING OILS; MICROSTRUCTURE; NANOINDENTATION; SPUTTERING; STAMPING;

ELECTRON-BEAM IRRADIATION; NANO-COLUMNAR CARBON COATING;

HARD COATINGS;

AMORPHOUS CARBON; CHEMICAL MODIFICATION; DEFORMATION; FORMABILITY; GRAPHITIZATION; HARD COATINGS; LUBRICATING OILS; MICROSTRUCTURE; NANOINDENTATION; SPUTTERING; STAMPING;

EID: 36049003084     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2007.05.059     Document Type: Article

References (14)

1. McCabe J., et al. Lubr. Eng. 57 12 (2001) 22
2. Kataoka S., et al. Surf. Coat. Technol. 177-178 (2004) 582
3. Kataoka S. Jpn. J. Light Metals 55 (2005) 39
4. Kim K.Y., et al. Surf. Coat. Technol. 87 (1996) 569
5. Vercammen K., et al. Surf. Coat. Technol. 134 (2000) 466
6. In: Dai L. (Ed). Carbon Nanotechnology (2006), Elsevier
7. Chhowalla M., et al. Phil. Mag. Lett. 75 (1997) 329
8. Gupta S., et al. Mater. Sci. 21 (2006) 3109
9. Iwamura E. Ceram. Trans. 148 (2003) 139
10. Iwamura E. Rev. Adv. Mater. Sci. 5 (2003) 34
11. E. Iwamura and T. Aizawa: Proc. MRS-2005, Session-I (2006) CD-ROM.
12. E. Iwamura and T. Aizawa: Proc. MRS-2006, Session-N (in press).
13. Thornton J.A. SPIE. 821, Modeling of Optical Thin Films (1987) 95
14. T. Aizawa and W. Iwamura: Proc. Intermold-2006 (2006) CD-ROM.