Characterization of nanometer-scale columnar and low-density boundary network structures in hydrogenated Amorphous carbon films

Ceramic Transactions

Volumn 148, Issue , 2004, Pages 139-146

  Iwamura, Eiji ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; CHARACTERIZATION; ELECTRIC CONDUCTIVITY; GRAPHITE; HYDROGENATION; PRESSURE EFFECTS; SPUTTER DEPOSITION; TRANSMISSION ELECTRON MICROSCOPY;

COLUMNAR STRUCTURES; HYDROGENATED AMORPHOUS CARBON FILMS; LOW-DENSITY BOUNDARY NETWORK STRUCTURES;

AMORPHOUS FILMS;

EID: 2142762417     PISSN: None     EISSN: None     Source Type: Book Series    
DOI: None     Document Type: Conference Paper

References (9)

1. J.A. Thornton, "High Rate Thick Film Growth," Ann. Rev. Mater. Sci., 7 239-60 (1977).
2. R. Messier and R.C. Ross, "Evolution of Microstructure in Amorphous Hydrogenated Silicon," J. Appl. Phys., 53 [9] 6220-25 (1982).
3. R. Messier, A.P. Giri and R.A. Roy, "Revised Structure Zone Model for Thin Film Physical Structure," J. Vac. Sci. Technol., A2 [2] 500-03 (1984).
4. G.S. Bales and A. Zangwill, "Macroscopic Model for Columnar Growth of Amorphous Films by Sputter Deposition," J. Vac. Sci. Technol., A9 [1] 145-49 (1991).
5. A. Staudinger and S. Nakahara, "The Structure of the Crack Network in Amorphous Films," Thin Solid Films, 45 125-33 (1977)
6. W.J. Nam, S. Bae, A.K. Kalkan and S.J. Fonash, "Nano- and MicroChannel Fabrication Using Column/void Network Deposited Silicon," J. Vac. Sci. Technol., A19 [4] 1229-33 (2001).
7. J. Robertson, "Diamond-like amorphous carbon," Mat. Sci. Eng., R37 [4-6] 129-281 (2002).
8. R. Messier and J.E. Yehoda, "Geometry of thin-film morphology," J. Appl. Phys., 58 [10] 3739-46 (1985).
9. R. Messier, "Toward Quantification of Thin Film Morphology," J. Vac. Sci. Technol., A4 [3] 490-95 (1986).