Dissolution characteristics of ceria in ascorbic acid solutions with implications to cleaning

Solid State Phenomena

Volumn 103-104, Issue , 2005, Pages 283-286

  Tamilmani, S ^a   Lowalekar, V ^a   Raghavan, S ^a   Small, R ^b  

^a University of Arizona   (United States)

^b BS Associates   (United States)

Author keywords

Ascorbic acid; Ceria particles; Post CMP cleaning; STI CMP

Indexed keywords

EID: 36048997552     PISSN: 10120394     EISSN: 16629779     Source Type: Book Series    
DOI: 10.4028/www.scientific.net/SSP.103-104.283     Document Type: Conference Paper

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5. James May, Frontiers in bioscience III, (1998), p. 1-10.
6. Tamilmani, S. et al; Symposium on Chemical Mechanical Planarization, MRS Proceedings, (2003), 767, F3.3.1-6.
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