Laser output power stabilization for direct laser writing system by using an acousto-optic modulator

Review of Scientific Instruments

Volumn 78, Issue 10, 2007, Pages

  Kim, Dong Ik ^a   Rhee, Hyug Gyo ^a   Song, Jae Bong ^a   Lee, Yun Woo ^a  

^a Korea Research Institute of Standards and Science   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTOOPTICAL DEVICES; DIFFRACTIVE OPTICAL ELEMENTS; FEEDBACK; HOLOGRAMS; OPTICAL RESOLVING POWER; STABILIZATION;

COMPUTER-GENERATED HOLOGRAMS; DIRECT LASER WRITING; OUTPUT POWER; POWER STABILITY; SERVO CONTROLLERS;

LIGHT MODULATORS;

ACOUSTICS; ARTICLE; ELECTRONICS; ENERGY TRANSFER; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; LASER; OPTICS; REPRODUCIBILITY; SENSITIVITY AND SPECIFICITY; SIGNAL PROCESSING;

ACOUSTICS; ELECTRONICS; ENERGY TRANSFER; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; LASERS; OPTICS; REPRODUCIBILITY OF RESULTS; SENSITIVITY AND SPECIFICITY; SIGNAL PROCESSING, COMPUTER-ASSISTED;

EID: 36048944505     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2801012     Document Type: Article

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