Performance comparison of Nb and NbN Antenna-coupled microbolometers

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6549, Issue , 2007, Pages

  Dietlein, C ^a,b,c   Luukanen, A ^b   Penttila, J S ^b   Sipola, H ^b   Gronberg L ^b   Seppa H ^b   Helisto P ^b   Grossman, E N ^c  

^a UCB 450   (United States)

^b VTT TECHNICAL RESEARCH CENTRE OF FINLAND   (Finland)

^c NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Bolometer; Millimeter wave; Terahertz

Indexed keywords

CURRENT VOLTAGE CHARACTERISTICS; MILLIMETER WAVES; THERMAL EFFECTS;

BOLOMETER RESISTANCE; ROOM TEMPERATURE; TERAHERTZ;

BOLOMETERS;

EID: 35948975171     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.719586     Document Type: Conference Paper

References (15)

1. D. P. Neikirk, Lam, W. W., and Rutledge, D.B., "Far-infrared Microbolometer Detetctors," Int. J. of Ir and Mm-Waves, vol. 5, pp. 245-277, 1984.
2. M. E. MacDonald. Grossman, E. N., "Niobium Microbolometers for Far-infrared Detection," IEEE Trans. on Microwave Theory and Techniques, vol. 43, pp. 893-896, 1995.
3. A. Rahman, deLange, G., Hu, Q., "Micromachined Room-temperature Microbolometers for Millimeter-wave Detection," Appl. Phys. Lett., vol. 68, pp. 2020-2022, 1996
4. R. A. Wood, "Monolithic Silicon Microbolometer Arrays," in Uncooled Infrared Imaging Arrays and Systems, vol. 47, Semiconductors and Semimetals, P. W. Kruse and D. D. Skatrud, Eds. San Diego: Academic Press, 1997, pp. 43-122.
5. M. Gurvitch, M. A. Washington, and H. A. Huggins, "High-quality refractory Josephson tunnel junctions utilizing thin aluminum layers," Appl. Phys. Lett., vol. 42, pp. 472-474, 1983.
6. A. Luukanen, E. N. Grossman, A. J. Miller, P. Helistö, J. S. Penttilä, H. Sipola, and H. Seppä, "An ultra-low noise superconducting antenna-coupled microbolometer with a room-temperature readout," IEEE Microw. Wirel. Compon. Lett, vol. 16, pp. 464-466, 2006.
7. A. Luukanen, "High performance microbolometers and microcalorimeters: from 300 K to 100 mK," Ph.D. thesis, Department of Physics, University of Jyväskylä, 2003.
8. D. W. Floet, J. J. A. Baselmans, T. M. Klapwijk, and J. R. Gao. "Resistive transition of niobium superconducting hot-electron bolometer mixers." Appl. Phys. Lett., vol. 73, no. 19, pp. 2826-2828, 1998.
9. D. W. Floet, E. Miedema, T. M. Klapwijk, and J. R. Gao, "Hotspot mixing: A framework for heterodyne mixing in superconducting hot-electron bolometers," Appl. Phys. Lett., vol. 74, no. 3, pp. 433-435, 1999.
10. W. J. Skocpol, M. R. Beasley, and M. Tinkham, "Self-heating hotspots in superconducting thin-film microbridges," J. Appl. Phys., vol. 45, pp. 4054-4066, 1974.
11. D. P. a. R. Neikirik, D.B., "Air-bridge Microbolometer for Far-infrared Detection," Appl. Phys. Lett., vol. 44, pp. 153-155, 1984.
12. A. Nigro, Nobile, G., Rubino, M.G., and Vaglio, R., "Electrical Resistivity of Polycrystalline Niobium Nitride Films," Phys. Rev. B., vol. 37, pp. 3970-3972, 1988.
13. A. J. Miller, A. Luukanen, and E. N. Grossman, "Micromachined antenna-coupled uncooled microbolometers for terahertz imaging arrays," Proc. SPIE, vol. 5411, pp. 18-24, 2004.
14. A. Luukanen and J. P. Pekola, "A superconducting antenna-coupled hot-spot microbolometer," Appl. Phys. Lett., vol. 82, pp. 3970-3972, 2003.
15. J. S. Penttilä, H. Sipola, P. Helistö, and H. Seppä, "Low-noise readout of superconducting bolometers based on electrothermal feedback," Supercond. Sci. Technol., vol. 19, pp. 319-322, 2006.