Piezoresistive and piezoelectric MEMS strain sensors for vibration detection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6529 PART 2, Issue , 2007, Pages

  Kon, Stanley ^a   Oldham, Kenn ^b   Horowitz, Roberto ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b U S ARMY RESEARCH LABORATORY   (United States)

Author keywords

Piezoelectric sensor; Piezoresistive; Piezoresistor; Strain gage; Vibration; ZnO

Indexed keywords

MECHANICAL SYSTEMS; PIEZORESISTIVE SENSORS; STRAIN SENSORS; VIBRATION DETECTION;

MEMS; MICROFABRICATION; PIEZOELECTRIC MATERIALS; POLYSILICON; STAINLESS STEEL; VIBRATION ANALYSIS;

SENSORS;

EID: 35548953574     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.715814     Document Type: Conference Paper

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