Magnetostrictive bending micro actuator using iron gallium alloy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6526, Issue , 2007, Pages

  Ueno, Toshiyuki ^a   Higuchi, Toshiro ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

Galfenol; Microactuator; Milling

Indexed keywords

IRON ALLOYS; MAGNETIC MATERIALS; MAGNETOSTRICTION; MILLING (MACHINING); POLYCRYSTALLINE MATERIALS; STAINLESS STEEL;

MAGNETIC LOOPS; MAGNETOSTRICTIVE BENDING; MICRO BENDING ACTUATORS;

MICROACTUATORS;

EID: 35548951368     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.715878     Document Type: Conference Paper

References (7)

1. A.E.Clark, M.Wun-Fogle and J.B.Restorff, "Magnetostrictive Properties of Body-Centered Cubic Fe-Ga and Fe-Ga-Al Alloy", IEEE Transactions on Magnetics Vol.37, pp.3238-3240, 2000.
2. A.E.Clark, M.Wun-Fogle and J.B.Restorff, "Magnetostrictive property of Galfenol alloys under compressive stress", Materials Transaction Vol.43, pp.881-886, 2002.
3. R.R.Basantkumar, B.J.H.Stadler, W.P. Robbins, and E. Summers, "Integration of Thin-Film Galfenol With MEMS Cantilevers for Magnetic Actuation", IEEE Transactions on Magnetics Vol.42, pp.3102-3104, 2006.
4. L. M. Cheng, R. Ham-Sua and M. A. Gharghouri "High temperature plasticity of polycrystalline Galfenol (Fe-Ga)", Proceedings of SPIE Smart Structures and Materials, Vol.6170, 2006.
5. T.Ueno, E.Summers, and T. Higuchi,"Machining of Iron-Gallium for Microactuator", Proceedings of SPIE Smart Structures and Materials, Vol.6170, 2006.
6. E.Summers, T.A.Lograsso, J.D.Snodgrass and J.Slaughter,"Magnetic and mechanical properties of polycrystalline Galfenol", Proceedings of SPIE Smart Structures and Materials Vol.5387, pp.448-459, 2004.
7. M.Wun-Fogle, J.B.Restorff and A.E.Clark, "Magnetostriction of stress annealed Fe-Ga-Al and Fe-Ga alloys under compressive and tensile stress", Proceedings of SPIE Smart Structures and Materials Vol. 5387, pp.468-475, 2004.