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Volumn 46, Issue 22, 2007, Pages 5452-5455

Design of circular Dammann gratings by employing the circular spot rotation method

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; LIGHT; NUMERICAL METHODS;

DAMMANN GRATINGS; SCALAR DIFFRACTION THEORY; SPACING;

DIFFRACTION GRATINGS;

EID: 35448936785 PISSN: 1559128X EISSN: 15394522 Source Type: Journal
DOI: 10.1364/AO.46.005452 Document Type: Article

Times cited : (8)

References (11)

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2
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- Design of circular Dammann grating
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3
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4
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5
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6
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8
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