Design, fabrication, and integration technology of large-scale microlens array for infrared charge coupled device application

International Journal of Infrared and Millimeter Waves

Volumn 25, Issue 3, 2004, Pages 439-449

  Ke, Caijun ^a   Yi, Xinjian ^a   Lai, Jianjun ^a   Chen, Sihai ^a   He, Miao ^a  

^a HUAZHONG UNIVERSITY OF SCIENCE AND TECHNOLOGY   (China)

Author keywords

Diffractive microlens; Integration; IRCCD; Responsivity

Indexed keywords

INTEGRATION; MICROLENSES; PHOTOLITHOGRAPHY; PHOTOSENSITIVITY; QUARTZ; REACTIVE ION ETCHING; SCHOTTKY BARRIER DIODES;

DIFFRACTIVE MICROLENS; INFRARED CHARGE COUPLED DEVICE (IRCCD); INFRARED QUARTZ SUBSTRATE; SUBMICRON PHOTOLITHOGRAPHY;

CHARGE COUPLED DEVICES;

EID: 3543121272     PISSN: 01959271     EISSN: None     Source Type: Journal    
DOI: 10.1023/B:IJIM.0000019311.40863.f0     Document Type: Conference Paper

References (9)

1. Bosiers, J.T.; Dillen, B.G.M.; Draijer, C.; Kleimann, A.C. IEEE Transactions on Electron Devices, Vol.50, No.1 (2003): 254-265
2. Sakakibara, K.; Yamamoto, H.; Maegawa, S.; Kawashima. 1991 IEEE International Conference on Consumer Electronics. Vol.37, No.3 (1991): 152-153
3. Veldkamp W B, McHugh T J. 266(5) (1992): 92-97.
4. Swanson G J. Lincoln Lab.Tech.Rep (1989), 854.
5. William Goltsos, Michael Holz. Optical Engineering. Vol.29, No. 11 (1990): 1392-1397.
6. Yi Li, Xinjian Yi, Liping Cai. International J. Infrared and Millimeter Waves, Vol.21.No.9, (2000): 1417-1425.
7. Sihai Chen, Xinjian Yi, Yi Li. International J.Infrared and Millimeter Waves, 2001,22(3): 393-398
8. Sihai Chen, Xinjian Yi, etc. International J. Infrared and Millimeter Waves, 2002, 23(5): 705-710.
9. Jahns J, Walker S J. Appl.Opt, Vol.29, No.7 (1990): 931-936.