Investigation of processing parameters for pulsed closed field unbalanced magnetron sputtered titanium carbide thin films

Surface Engineering

Volumn 23, Issue 1, 2007, Pages 23-27

  Anton, J M ^a   Mishra, B ^a   Moore, J J ^a  

^a Department of Metallurgical and Materials Engineering   (United States)

Author keywords

Bombardment; Carbide; Closed field; Friction; Hardness; Ion; Magnetron; Microstructure; Pulsed; Sputtering; Substrate; Titanium; Tribology; Unbalanced; Wear

Indexed keywords

ELASTIC MODULI; GRAPHITE; HARDNESS; INORGANIC COATINGS; MAGNETRON SPUTTERING; MICROSTRUCTURE; THERMAL EFFECTS; TITANIUM CARBIDE; TRIBOLOGY; WEAR RESISTANCE;

CLOSED FIELD UNBALANCED MAGNETRON SPUTTERING; WEAR RESISTANT COATING;

THIN FILMS;

EID: 35349016909     PISSN: 02670844     EISSN: None     Source Type: Journal    
DOI: 10.1179/174329407X161645     Document Type: Article

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