MEMS-based microelectrode system incorporating carbon nanotubes for ionization gas sensing

Sensors and Actuators, B: Chemical

Volumn 127, Issue 2, 2007, Pages 637-648

  Hou, Zhongyu ^a   Liu, Hai ^a   Wei, Xing ^a   Wu, Jiahao ^a   Zhou, Weimin ^a   Zhang, Yafei ^a   Xu, Dong ^a   Cai, Bingchu ^a  

^a BEIJING UNIVERSITY OF POSTS AND TELECOMMUNICATIONS   (China)

Author keywords

Carbon nanotubes; MEMS; Micro discharges; Micro gas sensors; Microelectrode systems

Indexed keywords

CARBON NANOTUBES; CHEMICAL SENSORS; CURRENT VOLTAGE CHARACTERISTICS; ELECTROSTATIC DISCHARGE; GAS SENSING ELECTRODES; MEMS; PLASMA HEATING;

MICRO DISCHARGES; MICRO-GAS SENSORS; MICROELECTRODE SYSTEMS; THERMAL PLASMA GENERATION;

MICROELECTRODES;

EID: 35349012252     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2007.05.026     Document Type: Article

References (29)

1. Suehle J., Cavicchi R.E., Gaitan M., and Semancik S. Tin oxide gas sensor fabricated using CMOS micro-hotplates and in situ processing. IEEE Electron Device Lett. 24 (1993) 118-120
2. Mueller G., Friedberger A., Kreisl P., Ahlers S., Schulz O., and Becker T. A MEMS toolkit for metal-oxide-based gas sensing systems. Thin Solid Films 436 (2003) 34-45
3. Collins P., Bradley K., Ishigami M., and Zettl A. Extreme oxygen sensitivity of electronic properties of carbon nanotubes. Science 287 (2000) 1801-1804
4. Kong J., Franklin N.R., Zhou C., Chapline M.G., Peng S., Cho K., and Dai H. Nanotube molecular wires as chemical sensors. Science 287 (2000) 622-625
5. Townsend J.S. The Theory of Ionization of Gases by Collision (1910), Constable & Company Ltd., London
6. Meek J.M., and Craggs J.D. Electric Breakdown of Gases (1953), The Clarendon Press, Oxford
7. Loeb L.B. Electrical Coronas (1965), University of California Press, Berkeley
8. Modi A., Koratkar N., Lass E., Wei B., and Ajayan P.M. Miniaturized gas ionization sensors using carbon nanotubes. Nature 424 (2003) 171-174
9. A. Modi, N. Koratkar, P. Ajayan, Carbon nanotube electrode films for gas sensing, 45th AIAA ASME ASCE AHS Struct., Struct. Dyn. and Mater. Conf. Palm Springs, American Institute of Aeronautics and Astronautics, CA, USA, 2004.
10. Zhang Y., Liu J., Li X., Tang X., and Zhu C. Study of improving identification accuracy of carbon nanotube film cathode gas sensor. Sens. Actuators A: Phys. 125 (2005) 15-24
11. Li X., Liu J.H., Zhang Y., Dou J.Y., Liu W.H., He Y.N., and Zhu C.C. Study of catalyst grains effect on electrode of self-sustaining discharge carbon nanotubes gas sensor array. Vacuum Microelectronics Conference. Davis, CA, USA, IEEE (2001)
12. Peterson M.S., Zhang W., Fisher T.S., and Garimella S.V. Low-voltage ionization of air with carbon-based materials. Plasma Sources Sci. Technol. 14 (2005) 654-660
13. Farson D.F., Choi H.W., and Rokhlin S.I. Electrical discharges between platinum nanoprobe tips and gold films at nanometre gap lengths. Nanotechnology 17 (2006) 132-139
14. Zhang W., Fisher T.S., and Garimella S.V. Simulation of ion generation and breakdown in atmospheric air. J. Appl. Phys. 96 (2004) 606-6672
15. Ono T., Sim D.Y., and Esashi M. Micro-discharge and electric breakdown in a micro-gap. J. Micromech. Microeng. 10 (2000) 445-451
16. Slade P.G., and Taylor E.D. Electrical breakdown in atmospheric air between closely spaced (0.2-40 μm) electrical contacts. IEEE Trans. Comp. Packag. Technol. 25 (2002) 390-396
17. Kim S.J. Gas sensors based on Paschen's law using carbon nanotubes as electron emitters. J. Phys. D: Appl. Phys. 39 (2006) 3026-3029
18. Y.F. Zhang, D. Xu, Carbon nanotubes and copper composite electroplating and electro-interlinking methods, Chinese Patent No. CN1929110.
19. Hou Z.Y., Cai B.C., and Xu D. Application of carbon nanotubes to field emission display. Appl. Phys. Lett. 89 (2006) 053105
20. Hou Z.Y., Xu D., and Cai B.C. Ionization gas sensing in a microelectrode system with carbon nanotubes. Appl. Phys. Lett. 89 (2006) 213502
21. Cho Y.-R., Lee J.H., Song Y.-H., Kang S.-Y., Jung M.-Y., Hwang C.-S., and Cho K.I. Patterning technology of carbon nanotubes for field emission displays. J. Vac. Sci. Technol. B, Microelectron. Nanometer Struct. 19 (2001) 1012-1015
22. Kim D.-H., Kim C.-D., and Lee H.R. Effects of the ion irradiation of screen-printed carbon nanotubes for use in field emission dispay applications. Carbon 42 (2004) 1807-1812
23. Y.F. Zhang, Z.Y. Hou, B.C. Cai, D. Xu, X. Wei, Micro structure construction method for carbon nanotubes, Chinese Patent No. CN1709786.
24. Chambers A., Fitch R.K., and Halliday B.S. Basic Vacuum Technology vol. 2 (1998), Philadelphia Institute of Physics Publishing, Bristol p. 32
25. Li J., Lei W., Zhang X., Zhou X., Wang Q., Zhang Y., and Wang B. Field emission characteristic of screen-printed carbon nanotube cathode. Appl. Surf. Sci. 220 (2003) 96-104
26. Forbes R.G., Edgcombe C.J., and Valdrè U. Some comments on models for field enhancement. Ultramicroscopy 95 (2003) 57-65
27. Kwo J.L., Yokoyama M., Wang W.C., Chuang F.Y., and Lin I.N. Characteristics of flat panel display using carbon nanotubes as electron emitters. Diamond Relat. Mater. 9 (2000) 1270-1274
28. Forbes R.G., Edgcombe C.J., and Valdre U. Some comments on models for field enhancement. Ultramicroscopy 95 (2003) 57-65
29. Forbes R.G. Low-macroscopic-field electron emission from carbon films and other electrically nanostructured heterogeneous materials: hypothesis about emission mechanism. Solid-State Electron. 45 (2001) 779-808