Global modeling of magnetized capacitive discharges

IEEE Transactions on Plasma Science

Volumn 35, Issue 5 I, 2007, Pages 1413-1419

  Carter, Mark D ^a   Hoffman, Dan ^b   Shannon, Steve ^b   Ryan, Philip M ^c   Buchberger, D ^b  

^a Ad Astra Rocket Company   (United States)

^b APPLIED MATERIALS INC   (United States)

^c OAK RIDGE NATIONAL LABORATORY   (United States)

Author keywords

Capacitance; Electromagnetic analysis; Electromagnetic coupling; Electromagnetic fields; Electromagnetic heating; Electromagnetic measurements; Electromagnetic propagation in absorbing media; Electromagnetic propagation in anisotropic media; Electromagnetic propagation in dispersive media; Electromagnetic propagation in nonhomogeneous media; Electromagnetic propagation in nonlinear media; Electromagnetic propagation in plasma media; Electromagnetic surface waves; Magnetic confinement; Magnetic field effects; Magnetic fields; Perpendicular magnetic anisotropy; Plasma applications; Plasma confinement; Plasma control; Plasma devices; Plasma generation; Plasma heating; Plasma materials processing applications; Plasma measurements; Plasma properties; Plasma sheaths; Plasma waves; Plasmas

Indexed keywords

ELECTRIC DISCHARGES; ELECTROMAGNETIC WAVE PROPAGATION; MAGNETIC ANISOTROPY; MAGNETOELECTRIC EFFECTS; MATHEMATICAL MODELS; PLASMA CONFINEMENT; PLASMA FLOW; PLASMA SHEATHS; PLASMA WAVES;

CAPACITIVE REACTORS; MAGNETIC CONFINEMENT; MAGNETIZED CAPACITIVE DISCHARGES;

ELECTRIC REACTORS;

EID: 35348896072     PISSN: 00933813     EISSN: None     Source Type: Journal    
DOI: 10.1109/TPS.2007.906124     Document Type: Article

References (5)

1. M. Lieberman et al., "Standing wave and skin effects in large-area, high-frequency capacitive discharges," Plasma Sources Sci. Technol., vol. 11, no. 3, p. 283, Aug. 2002.
2. M. D. Carter, P. M. Ryan, D. Hoffman, W. S. Lee, D. Buchberger, and V. Godyak, "Combined RF and transport effects in magnetized capacitive discharges," J. Appl. Phys., vol. 100, no. 7, p. 073 305, Oct. 2006.
3. T. H. Stix, Waves in Plasmas. New York: Amer. Inst. Phys., 1992.
4. V. A. Godyak, 1986 Soviet Radio Frequency Discharge Research. Falls Church, VA: Delphic Associates.
5. M. A. Lieberman, "Analytical solution for capacitive RF sheath," IEEE Trans. Plasma Sci., vol. 16, no. 6, p. 638, Dec. 1988.