Multidimensional fluid-particle modelling technique in low-temperature argon plasma at low pressure

Vacuum

Volumn 82, Issue 2 SPEC. ISS., 2007, Pages 220-223

  Bartoš, Petr ^a   Hrach, Rudolf ^a   Jelínek, Petr ^a  

^a CHARLES UNIVERSITY   (Czech Republic)

Author keywords

Argon plasma; Fluid particle simulations; Plasma sheath

Indexed keywords

ALGORITHMS; ARGON; COMPUTER SIMULATION; PARTICLE INTERACTIONS; PRESSURE EFFECTS; SUBSTRATES;

ARGON PLASMA; FLUID-PARTICLE SIMULATIONS; MULTIDIMENSIONAL COMPUTER SIMULATIONS;

PLASMA SHEATHS;

EID: 35248867806     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.006     Document Type: Article

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