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Volumn 82, Issue 2 SPEC. ISS., 2007, Pages 201-204

Monte Carlo backscattering yield (BY) calculations applying continuous slowing down approximation (CSDA) and experimental data

Author keywords

Backscattering yield; Computer simulation; Elastic and inelastic scattering; Electron solid interactions; Monte Carlo algorithm

Indexed keywords

BACKSCATTERING; COMPUTER SIMULATION; ELASTIC SCATTERING; ELECTRON SPECTROSCOPY; INELASTIC SCATTERING; MONTE CARLO METHODS;

EID: 35248813806     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2007.07.040     Document Type: Article
Times cited : (18)

References (25)
  • 12
    • 35248877790 scopus 로고    scopus 로고
    • Jablonski A, Salvat F, Powell CJ. NIST electron elastic-scattering cross-section Database-Version 3.1, National Institute of Standards and Technology, Gaithersburg, MD, 2003, 〈http://www.nist.gov/srd/nist64.htm〉.
  • 13
    • 35248895070 scopus 로고    scopus 로고
    • Joy DC. A data base on electron-solid interactions, EM Facility, University of Tennessee, April 2004, 〈http://pciserver.bio.utk.edu/metrology/download/E-solid/database.doc〉.
  • 18
    • 35248850001 scopus 로고    scopus 로고
    • Bronstein IM, Fraiman BS. Vtorichnaya Elektronnaya Emissiya. Nauka: Moskva, 1969. p. 340.
  • 21
    • 35248882217 scopus 로고    scopus 로고
    • Joy DC, Joy CS. SEMATECH report TT# 96063130A-TR, August 1996.
  • 23
    • 35248895982 scopus 로고    scopus 로고
    • Hovington P, Joy DC, Gauvin R, Evans N. (1995), unpublished data. For a summary see Joy DC, Luo S, Gauvin R, Hovington P, Evans N. Scanning Microsc 1996;10:653-66.
  • 25
    • 35248865956 scopus 로고    scopus 로고
    • Luo S. PhD thesis University of Tennessee, 1994.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.