Immersion lithography with numerical apertures above 2.0 using high index optical materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6520, Issue PART 3, 2007, Pages

  Zhou, Jianming ^a   Lafferty, Neal V ^a   Smith, Bruce W ^a   Burnett, John H ^b  

^a ROCHESTER INSTITUTE OF TECHNOLOGY   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

Author keywords

Hyper NA; Immersion lithography; Oblique angle; Total internal reflection

Indexed keywords

IMMERSION LITHOGRAPHY; LUTETIUM ALUMINUM GARNET; OBLIQUE ANGLE; PHOTORESIST BOUNDARY; TOTAL INTERNAL REFLECTION;

IMAGE ANALYSIS; LASERS; NUMERICAL METHODS; OPTIMIZATION; REFLECTION; REFRACTIVE INDEX;

PHOTOLITHOGRAPHY;

EID: 35148885222     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.712429     Document Type: Conference Paper

References (12)

1. "International technology roadmap for semiconductors 2006 update, Lithography," (2006), http://www.itrs.net/Links/2006Update/FinalToPost/ 08_Lithography2006Update.pdf.
2. J. R. Sheats and B. W. Smith, Microlithography: Science and Technology. Marcel Dekker, New York, 1998.
3. B. W. Smith, Y. Fan, J. Zhou, N. V. Lafferty, A. Estroff, "Evanescent wave imaging in optical lithography", Proc. SPIE Optical Microlithography, vol. 6154 (2006).
4. B. W. Smith, Excimer Laser Microlithography at 193 Nm, 1994.
5. J. H. Burnett, S. G. Kaplan, E. L. Shirley, D. Horowitz, W. Clauss, A. Grenville, C. V. Peski, "High-index optical materials for 193-nm immersion lithography", Proc. SPIE Optical Microlithography, vol. 6154 (2006).
6. http://www.insaco.com/MatPages/sapphire.asp
7. E. A. Saleh and M. C. Teich, Fundamentals of Photonics, Wiley, New York, 1991.
8. Hecht, Optics, Addison-Wesley, Reading, Mass., 2002.
9. P. E. Ciddor, "Explicit evaluation of the complex angle of refraction in an absorbing medium", Indian Journal of Pure Applied Physics v20, n5, 397(1982).
10. R. W. Ditchburn, Light, Interscience Publishers, New York, 1963.
11. R. W. G. Wyckoff, Crystal Structures, Interscience Publishers, New York, 1963.
12. H. Li, X. Liu, L. Huang, "Fabrication of Transparent Cerium-Doped Lutetium Aluminum Garnet (LuAG:Ce) Ceramics by a Solid-State Reaction Method" Journal of the American Ceramic Society, v 88, n11, 3226 (2005).