Polyimide surface modification by low energy ion beam irradiation

Materials Science Forum

Volumn 492-493, Issue , 2005, Pages 659-664

  Lee, W J ^a   Lee, Y S ^b   Rha, S K ^b   Lim, K Y ^c   Lee, H S ^d   Whang, C N ^e  

^a Sejong University   (South Korea)

^b Hanbat National University   (South Korea)

^c Hynix Semiconductor Inc   (South Korea)

^d Korea Testing Laboratory   (South Korea)

^e Yonsei University   (South Korea)

Author keywords

Ion beam; Polyimide; Surface modification

Indexed keywords

CARBONIZATION; ION BEAMS; ION BOMBARDMENT; SURFACE ROUGHNESS; SURFACE STRUCTURE; SURFACE TREATMENT;

INERT IONS; ION DOSES; LOW ENERGY ION BEAM IRRADIATION;

POLYIMIDES;

EID: 35148839821     PISSN: 02555476     EISSN: 16629752     Source Type: Book Series    
DOI: 10.4028/0-87849-970-9.659     Document Type: Conference Paper

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