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Volumn 6521, Issue , 2007, Pages

Prediction of interconnect delay variations using pattern matching

Author keywords

Coma; Defocus; Extraction; Maximum lateral impact function; Pattern matching; Process variation; Timing

Indexed keywords

CAPACITANCE; DELAY CIRCUITS; ELECTRIC CONDUCTORS; ELECTRIC RESISTANCE; LARGE SCALE SYSTEMS; PERTURBATION TECHNIQUES; SCANNING;

EID: 35148836136     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.712257     Document Type: Conference Paper
Times cited : (3)

References (8)
  • 1
    • 35148825841 scopus 로고    scopus 로고
    • 2005 International Technology Roadmap for Semiconductors
    • 2005 International Technology Roadmap for Semiconductors, http://www.itrs.net
  • 3
    • 35148826743 scopus 로고    scopus 로고
    • Star-RCXT User Guide Version Z-2006.12, Synopsys, Inc.
    • Star-RCXT User Guide Version Z-2006.12, Synopsys, Inc.
  • 4
    • 35148854905 scopus 로고    scopus 로고
    • F. Gennari, Linking TCAD and EDA Through Pattern Matching, Ph.D. Dissertation, EECS Department, Technical Report No. UCB/ERL M04/31, UC Berkeley, 2004.
    • F. Gennari, "Linking TCAD and EDA Through Pattern Matching," Ph.D. Dissertation, EECS Department, Technical Report No. UCB/ERL M04/31, UC Berkeley, 2004.
  • 5
    • 35148855049 scopus 로고    scopus 로고
    • DRC Plus: Augmenting standard DRC with pattern matching on 2D geometries
    • V. Dai, J. Yang, L. Capodieci, and N. P. Rodriguez, "DRC Plus: augmenting standard DRC with pattern matching on 2D geometries," Proceedings of SPIE, vol. 6521(08), 2007.
    • (2007) Proceedings of SPIE , vol.6521 , Issue.8
    • Dai, V.1    Yang, J.2    Capodieci, L.3    Rodriguez, N.P.4
  • 6
    • 0011803699 scopus 로고    scopus 로고
    • Parasitic Extraction: Current State of the Art and Future Trends
    • W. Kao, C. Lo, M. Basel, and R. Singh, "Parasitic Extraction: Current State of the Art and Future Trends," Proceedings of the IEEE, vol.89(5), 2001.
    • (2001) Proceedings of the IEEE , vol.89 , Issue.5
    • Kao, W.1    Lo, C.2    Basel, M.3    Singh, R.4
  • 7
    • 29244448419 scopus 로고    scopus 로고
    • Interferometric Pattern and Probe-Based Aberration Monitors,
    • Ph.D. Dissertation, AS&T Department, UC Berkeley
    • G. Robbins, "Interferometric Pattern and Probe-Based Aberration Monitors," Ph.D. Dissertation, AS&T Department, UC Berkeley, 2005.
    • (2005)
    • Robbins, G.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.