Polarization aberration analysis using pauli-zernike representation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6520, Issue PART 1, 2007, Pages

  Yamamoto, Norihiro ^a   Kye, Jongwook ^b   Levinson, Harry J ^b  

^a Spansion Japan Ltd ^*  (Japan)

^b ADVANCED MICRO DEVICES   (United States)

Author keywords

Jones calculus; Pauli spin matrix; Polarization aberration; Ultra high NA; Zernike polynomials

Indexed keywords

JONES CALCULUS; LENS SYSTEMS; PAULI SPIN MATRIXS; POLARIZATION ABERRATION ANALYSIS; POLARIZED ILLUMINATIONS; ZERNIKE POLYNOMIALS;

IMAGE QUALITY; LENSES; LIGHTING; LITHOGRAPHY; POLYNOMIALS; SENSITIVITY ANALYSIS;

POLARIZATION;

ILLUMINATION; IMAGE QUALITY; LENSES; LITHOGRAPHY; POLARIZATION; SENSITIVITY;

EID: 35148820201     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.711336     Document Type: Conference Paper

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