A monolithic three-dimensional ultrasonic transducer array for medical imaging

Journal of Microelectromechanical Systems

Volumn 16, Issue 5, 2007, Pages 1015-1024

  Chen, Jingkuang ^a   Cheng, Xiaoyang ^a   Shen, I Ming ^b   Liu, Jian Hung ^b   Li, Pai Chi ^b   Wang, Mengli ^a  

^a University of New Mexico   (United States)

^b NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

Acoustic transducers

Indexed keywords

FLIP CHIP DEVICES; MICROFABRICATION; MONOLITHIC INTEGRATED CIRCUITS; ULTRASONIC IMAGING; ULTRASONIC TRANSDUCERS;

DIELECTRIC MEMBRANES; IMAGER PRISMS; TRANSDUCER MICROFABRICATION;

MEDICAL IMAGING;

EID: 34948862204     PISSN: 10577157     EISSN: None     Source Type: Journal    
DOI: 10.1109/JMEMS.2007.902449     Document Type: Article

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