Oxygen ion-implanted optical channel waveguides in Nd : MMMgO : L iNbO3: Fabrication, characterization and simulation

Journal of Physics D: Applied Physics

Volumn 40, Issue 19, 2007, Pages 5824-5827

  Chen, Feng ^a   Tan, Yang ^a   Wang, Lei ^a   Lu, Qing Ming ^a   Ma, Hong Ji ^b  

^a SHANDONG UNIVERSITY   (China)

^b PEKING UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; ION BOMBARDMENT; ION IMPLANTATION; PHOTORESISTS; REFRACTIVE INDEX; WSI CIRCUITS;

OPTICAL CHANNEL WAVEGUIDES; PHOTORESIST MASKS; TRANSVERSE ELECTRIC MODES;

OPTICAL WAVEGUIDES;

EID: 34748919738     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/40/19/004     Document Type: Article

References (29)

1. Kip D 1998 Appl. Phys. B 67 131
2. Degl'Innocenti R, Reidt S, Guarino A, Rezzonico D, Poberaj G and Günter P 2006 J. Appl. Phys. 100 113121
3. Degl'Innocenti R, Guarino A, Poberaj G and Günter P 2006 Appl. Phys. Lett. 89 041103
4. Grivas G, Shepherd D P, Eason R W, Laversenne L, Moretti P, Borca C N and Pollnau M 2006 Opt. Lett. 31 3450
5. Lifante G 2003 Integrated Photonics: Fundamentals (Atrium, UK: Wiley)
6. Townsend P D, Chandler P J and Zhang J 1994 Optical Effects of Ion Implantation (Cambridge: Cambridge University Press)
7. Chen F, Wang X L and Wang K M 2007 Opt. Mater. 29 1523
8. Haertle D, Jazbinsk M, Montemezzani G and Günter P 2005 Opt. Express 13 3765
9. Sum T C, Bettiol A A, Florea C and Watt F 2006 IEEE J. Light. Technol. 24 3803
10. Schrempel F, Hoche Th, Ruske J P, Grusemann U and Wesch W 2002 Nucl. Instrum. Methods B 191 202
11. Chen F, Wang L, Jiang Y, Wang X L, Wang K M, Fu G, Lu Q M, Rüter C E and Kip D 2006 Appl. Phys. Lett. 88 071123
12. Vzquez G V, Rickards J, Lifante G, Domenech M and Cantelar E 2003 Opt. Express 11 1291
13. Bentini G G, Bianconi M, Chiarini M, Correra L, Sada C, Mazzoldi P, Argiolas N, Bazzan M and Guzzi R 2002 J. Appl. Phys. 92 6477
14. Wang X L, Chen F, Wang K M, Lu Q M, Shen D Y and Nie R 2004 Appl. Phys. Lett. 85 1457
15. Arizmendi L 2004 Phys. Status Solidi a 201 253
16. Cordova-Plaza A, Fan T Y, Digonnet M J F, Byer R L and Shaw H J 1988 Opt. Lett. 13 209
17. Lee C T and Sheu L G 1996 IEEE J. Light. Technol. 14 2268
18. Lallier E, Pocholle J P, Papuchon M, Grezes-Besset C, Pelletier E, De Micheli M, Li M J, He Q and Ostrowsky D B 1989 Electron. Lett. 25 1491
19. Field S J, Hanna D C, Shepherd D P, Tropper A C, Chandler P J, Townsend P D and Zhang L 1991 Opt. Lett. 16 481
20. Domenech M, Cantelar E, Torchia G A, Lifante G and Cussó F 2003 J. Luminesc. 102-103 357
21. Hu H, Lu F, Chen F, Shi B R, Wang K M and Shen D Y 2001 J. Appl. Phys. 89 5224
22. Hu H, Lu F, Chen F, Shi B R, Wang K M and Shen D Y 2001 Appl. Opt. 41 3759
23. Rams J, Olivares J, Chandler P J and Townsend P D 2000 J. Appl. Phys. 87 3199
24. Kostritskii S M and Moretti P 2007 J. Appl. Phys. 101 094109
25. Ziegler J F Computer code SRIM http://www.srim.org
26. Yevick D and Bardyszewski W 1992 Opt. Lett. 17 329
27. Chandler P J and Lama F L 1986 Opt. Acta 33 127
28. Jaque D, Cantelar E and Lifante G 2007 Appl. Phys. B 88 201
29. Rodríguez E M, Jaque D, Cantelar E, Cussó F, Lifante G, Busacca A C, Cino A C and Sanseverino S R 2007 Opt. Express 15 8805