Design of a 20 GHz low loss ohmic contact RF MEMS switch

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2007, Pages 371-374

  Goins, David A ^a   Nelson, Richard D ^a   McKillop, John S ^a  

^a TeraVicta Technologies Inc   (United States)

Author keywords

HF; MEMS switches; Ohmic contacts; Phase shifters; Tunable filters

Indexed keywords

BANDWIDTH; INSERTION LOSSES; MEMS; MICROWAVE ISOLATORS; OHMIC CONTACTS;

GROUND VIAS; MEMS SWITCHES; TUNABLE FILTERS;

ELECTRIC SWITCHES;

EID: 34748906063     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2007.380448     Document Type: Conference Paper

References (8)

1. Grant, P.D., Denhoff, M.W., and Mansour, R.R., "A Comparison between RF MEMS Switches and Semiconductor Switches, ICMEMS 2004: MEMS, NANO and Smart Systems, 2004 Proceedings", pp. 515- 521, Aug. 2004.
2. Dyck, Christopher W., Plut, Thomas A., Nordquist, Christopher D., Finnegan, Patrick S., Austin, Franklin, Reines, Isak C., Goldsmith, Chuck, "Fabrication and characterization of ohmic contacting RF MEMS switches", MEMS/MOEMS Components and Their Applications. Edited by Janson, Siegfried W.; Henning, Albert K. Proceedings of the SPIE, Volume 5344, pp. 79-88 (2004).
3. Guan-Leng Tan and Rebeiz, G.M., "A DC-contact MEMS shunt switch", Microwave and Wireless Components Letters, IEEE, Volume: 12, Issue: 6, pp. 212-214, Jun 2002.
4. Schauwecker, B.; Strohm, K.M.; Mack, T.; Simon, W.; Luy, J.-F., "Serial combination of ohmic and capacitive RF MEMS switches for large broadband applications", Electronics Letters Volume: 40 Issue: 1, pp. 44 - 46, 8 Jan. 2004.
5. Gabriel M. Rebeiz, RF MEMS: Theory, Design, and Technology, New York: John Wiley & Sons, 2003.
6. Yole Development, MEMS for Mobile06: updated analysis of the applications and markets of MEMS in mobile communications, 2006.
7. J. McKillop, T. Fowler, D. Goins and R. Nelson, "Design, Performance and Qualification of a Commercially Available MEMS Switch", Proceedings of 36th European Microwave Conference, pp. 1399 - 1401, Oct. 2006.
8. R. Nelson, W. Flynn, and D. Goins, "Plate-based microelectromechanical switch having a three-fold relative arrangement of contact structures and support arms", U. S. Patent 7,119,943, October 10, 2006.