메뉴 건너뛰기




Volumn 22, Issue 9, 2007, Pages 2363-2367

Single-crystal silicon films on glass

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC POTENTIAL; ELECTROLYSIS; FABRICATION; GLASS MANUFACTURE; SILICON WAFERS; SINGLE CRYSTALS; SYNTHESIS (CHEMICAL);

EID: 34748839602     PISSN: 08842914     EISSN: None     Source Type: Journal    
DOI: 10.1557/jmr.2007.0330     Document Type: Article
Times cited : (31)

References (9)
  • 3
    • 0029637854 scopus 로고
    • Silicon on insulator material technology
    • M. Bruel: Silicon on insulator material technology. Electron. Lett. 31, 1201 (1995).
    • (1995) Electron. Lett , vol.31 , pp. 1201
    • Bruel, M.1
  • 5
    • 0007056117 scopus 로고
    • Thin-oxide dual-elearon-injector annealing studies using conductivity and electron energy-loss spectroscopy
    • L. Dori, J. Bruley, D.J. Dimira, P.E. Batson, J. Tornello, and M. Arienzo: Thin-oxide dual-elearon-injector annealing studies using conductivity and electron energy-loss spectroscopy. J. Appl. Phys. 69, 2317 (1991).
    • (1991) J. Appl. Phys , vol.69 , pp. 2317
    • Dori, L.1    Bruley, J.2    Dimira, D.J.3    Batson, P.E.4    Tornello, J.5    Arienzo, M.6
  • 6
    • 5844306503 scopus 로고    scopus 로고
    • Optimized time-of-flight secondary ion mass spectroscopy depth profiling with a dual beam technique
    • K. Iltgen, C. Bendel, A. Benninghoven, and E. Niehuis: Optimized time-of-flight secondary ion mass spectroscopy depth profiling with a dual beam technique. J. Vac. Sci. Technol., A 15, 460 (1997).
    • (1997) J. Vac. Sci. Technol., A , vol.15 , pp. 460
    • Iltgen, K.1    Bendel, C.2    Benninghoven, A.3    Niehuis, E.4
  • 7
    • 34748895670 scopus 로고    scopus 로고
    • R.G. Manley, G. Fenger, K.D. Hirschman, J.G. Couillard, C. Kosik Williams, D. Dawson-Elli, and J. Cites: Demonstration of high performance TFTs on silicon-on-glass (SiOG) substrate, SID 2007 Digest, Paper 197 (Society for Information Display, San Jose, CA).
    • R.G. Manley, G. Fenger, K.D. Hirschman, J.G. Couillard, C. Kosik Williams, D. Dawson-Elli, and J. Cites: Demonstration of high performance TFTs on silicon-on-glass (SiOG) substrate, SID 2007 Digest, Paper 197 (Society for Information Display, San Jose, CA).


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.