Characterizing crystalline polymorph transitions in HfO2 by extended x-ray absorption fine-structure spectroscopy

Applied Physics Letters

Volumn 91, Issue 12, 2007, Pages

  Lysaght, Patrick S ^a   Woicik, Joseph C ^b   Alper Sahiner, M ^c   Lee, Byoung Hun ^a   Jammy, Raj ^d  

^a SEMATECH   (United States)

^b NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY   (United States)

^c SETON HALL UNIVERSITY   (United States)

^d IBM   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATOMIC LAYER DEPOSITION; CRYSTAL STRUCTURE; ELECTRON TRANSITIONS; INTERFACIAL ENERGY; METASTABLE PHASES; RAPID THERMAL ANNEALING; X RAY ABSORPTION FINE STRUCTURE SPECTROSCOPY;

ANNEAL TEMPERATURE; MONOCLINIC TRANSFORMATIONS; SURFACE ENERGY EFFECTS; TETRAGONAL PHASES;

HYDROGEN INORGANIC COMPOUNDS;

EID: 34648818999     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2789180     Document Type: Article

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