A 62μA interface ASIC for a capacitive 3-axis micro-accelerometer

Digest of Technical Papers - IEEE International Solid-State Circuits Conference

Volumn , Issue , 2007, Pages 318-320

  Paavola, Matti ^a   Kämäräinen, Mika ^a   Järvinen, Jere ^a   Saukoski, Mikko ^a   Laiho, Mika ^a,b   Halonen, Kari ^a  

^a AALTO UNIVERSITY   (Finland)

^b UNIVERSITY OF TURKU   (Finland)

Author keywords

[No Author keywords available]

Indexed keywords

ACCELEROMETERS; ACOUSTIC NOISE; CMOS INTEGRATED CIRCUITS; ENERGY DISSIPATION; INTERFACES (COMPUTER); SAMPLING;

3-AXIS MICRO-ACCELEROMETER; DIE AREA; MEASURED NOISE; TIME-MULTIPLEXED SAMPLING;

APPLICATION SPECIFIC INTEGRATED CIRCUITS;

EID: 34548828222     PISSN: 01936530     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ISSCC.2007.373422     Document Type: Conference Paper

References (5)

1. M. Lemkin et al., "A 3-Axis Surface Micromachined ΔΣ Accelerometer," ISSCC Dig. Tech. Papers, pp. 202-203, 1997.
2. T. Lehtonen and J. Thurau, "Monolithic Accelerometer for 3D Measurements," Advanced Microsystems for Automotive Applications, pp. 11-22, J. Valldorf, W. Gessner Eds., Springer, 2004.
3. H. Leuthold and F. Rudolf, "An ASIC for High-Resolution Capacitive Microaccelerometers," Sens. Actuators A, vol. 21, pp. 278-281, Feb., 1990.
4. R. Harjani, R. Heineke and F. Wang, "An Integrated Low-Voltage Class AB CMOS OTA," IEEE J. Solid-State Circuits, pp. 134-142, Feb., 1999.
5. A. P. Brokaw, "A Simple Three-Terminal IC Bandgap Reference," IEEE J. Solid-State Circuits, pp. 388-393, Dec., 1974.